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Electron temperatures in high power impulse magnetron sputtering: the role of the target material's sputter yield
Leibniz Instittute of Surface Engineering (IOM), Modelling and Simulation, Leipzig, Germany.
University of Iceland, Science Institute, Reykjavík, Iceland.
Linköping University, Plasma and Coatings Physics Division, IFM-Materials Physics, Linköping, Sweden.
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics. University of Iceland, Science Institute, Reykjavík, Iceland.ORCID iD: 0000-0002-8153-3209
2025 (English)In: 25th IEEE Pulsed Power Conference, PPC 2025 and the 52nd IEEE International Conference on Plasma Science, ICOPS 2025, Institute of Electrical and Electronics Engineers (IEEE) , 2025Conference paper, Published paper (Refereed)
Abstract [en]

Magnetron sputtering is a widely used process for thin-film deposition, employed in laboratory research and industry. It is based on a low-pressure plasma discharge in which ions of a working gas, typically argon, are created and accelerated toward a target containing the source material. Sputtering from the target releases target atoms into the gas phase that can condense on a substrate to form a thin film. High-power impulse magnetron sputtering (HiPIMS) achieves high discharge current densities by pulsing the discharge at a low duty cycle. This process generates a dense plasma region through which sputtered atoms pass with a high probability of becoming ionized. The resulting highly ionized flux of film-forming species enables for example the deposition of dense, crystalline and well-adhering thin films.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE) , 2025.
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-377825DOI: 10.1109/PPPS56198.2025.11248399Scopus ID: 2-s2.0-105029896179OAI: oai:DiVA.org:kth-377825DiVA, id: diva2:2043742
Conference
25th IEEE Pulsed Power Conference, PPC 2025 and the 52nd IEEE International Conference on Plasma Science, ICOPS 2025, Berlin, Germany, Jun 15 2025 - Jun 20 2025
Note

Part of ISBN 979-8-3315-4376-1

QC 20260306

Available from: 2026-03-06 Created: 2026-03-06 Last updated: 2026-03-06Bibliographically approved

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Gudmundsson, Jon Tomas

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