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Scalable Fabrication of 4 nm Silicon Nanopores by Self-Limiting Metal-Assisted Chemical Etching Combined with Optical Process Control
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0003-0960-9931
Univ Pavia, Dept Civil Engn & Architecture, Synthet Physiol Lab, I-27100 Pavia, Italy.
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0003-1917-6201
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-2278-1368
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2026 (English)In: Langmuir, ISSN 0743-7463, E-ISSN 1520-5827, Vol. 42, no 26, p. 18788-18800Article in journal (Refereed) Published
Abstract [en]

Solid-state nanopores in ultrathin (<20 nm) membranes enable label-free single-molecule sensing, but their adoption as sensors is limited by the lack of scalable manufacturing methods that deliver nanopores with single-nanometer reproducibility. Self-limiting metal-assisted chemical etching (MACE) in silicon-on-insulator (SOI) membranes offers a parallel wet-chemical route for nanopore fabrication, yet prior demonstrations lacked a predictive design rule and required electron microscopy or electrical tests for confirming presence and number of pores. Here, we convert self-limiting MACE into a manufacturing-oriented workflow with optical process control to obtain and verify the formation of 4 nm nanopores in a scalable fashion. We decouple the deposition of 200 +/- 10 nm gold (Au) nanoparticles from etching, enabling independent optimization of the two steps. The nanoparticle size allows for particle-per-membrane counting by dark-field optical microscopy, so that deposition can be repeated when counts are below target. We then map etching behavior across Au nanoparticle diameter d (10-200 nm) and silicon (Si) device-layer thickness t (5-18 nm), finding that d/t >= 0.8 ratio predicts self-limiting MACE behavior, where pore diameter becomes independent of particle size. In this regime, 200 +/- 10 nm catalysts yield 4 +/- 1 nm pores, corresponding to a reduction of similar to 50 & times; in pore diameter and similar to 10 & times; in pore-diameter variability compared to the catalyst diameter and related variability. Successful through-membrane pore formation produces undercuts in the buried oxide (typically similar to 200-300 nm diameter) beneath each pore, which can be characterized for each membrane by bright-field microscopy and used as a proxy for the otherwise optically invisible 4 nm pores. Together, the predictive d/t framework and two-stage optical verification establish a scalable wet-chemical route to fabricate nanopores for biomolecular sensing and related nanofluidic devices.

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American Chemical Society (ACS) , 2026. Vol. 42, no 26, p. 18788-18800
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URN: urn:nbn:se:kth:diva-387022DOI: 10.1021/acs.langmuir.6c00975ISI: 001805362000001PubMedID: 42345197Scopus ID: 2-s2.0-105044120958OAI: oai:DiVA.org:kth-387022DiVA, id: diva2:2091935
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QC 20260813

Available from: 2026-08-13 Created: 2026-08-13 Last updated: 2026-08-13Bibliographically approved

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De Ferrari, FabioLeva, Chrysovalantou VasilikiRaja, Shyamprasad NatarajanHerland, AnnaNiklaus, FrankStemme, Göran

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De Ferrari, FabioLeva, Chrysovalantou VasilikiRaja, Shyamprasad NatarajanHerland, AnnaNiklaus, FrankStemme, Göran
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